Customized Ceramic Spare Part

Product Name: Other Ceramic Spare Part

Material: 99.5% Alumina

Density: >3.90g/cm³

Product Type: Ceramic Spare Parts for Semiconductor Equipment

Remarks: The specific size can be made according to customer's drawings or samples

Brief Description

Our Semiconductor Equipment Ceramic Spare Part is made up of high purity alumina ceramic materials, and formed through cold isostatic pressing, high temperature sintering and precision finishing. We can make the precise tolerance to ±0.001mm, the surface finish to Ra0.1, and temperature resistance to 1600℃.

The Semiconductor Equipment Ceramic Spare Parts we produced with high temperature resistance, corrosion resistance, wear-resisting and insulation, can work in the high temperature, vacuum and etchant gas environment for a long time.  It is widely used in all kinds of semiconductor production equipments.